A rather tight lower bound $c(n)$ of the number of unlabeled digraphs of order $n$ (loops allowed) seems to be
$$c(n) = 2^{n^2}/n!$$
because there are $2^{n^2}$ labeled graphs, almost all of them are rigid, thus division by $n!$ is almost always "correct", but yields a slightly too small result, because it is sometimes not correct. How can this error be estimated, of which order is it? But most of all I'd like to know:
Is the growth rate of $c(n)$ super- or supra-exponential?
I know Stirling's formula, but I didn't manage to simplify the resulting expression.
If you apply Stirling's formula,
$c(n)\approx \frac{2^{n^2}e^{-n}}{n^n}$.
$\log c(n)\approx n^2 \log 2 - n \log n + n$
As the log increases faster than $n$, the growth is faster than any exponential.