To show Perelman $\mathcal{F}$ Energy in Ricci flow is invariant under diffeomorphisms

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The following Perelman $\mathcal{F}$ Energy $$\mathcal{F}(g,f) = \int_{M^{n}} (R + \mid \nabla f \mid^{2}) e^{-f} d\mu$$ is is invariant under diffeomorphisms. How to prove it? Or is there any references that gives complete proof of this conclusion?